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拆機
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裝機
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到場服務
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PM服務
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電話支援
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故障排除
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諮詢顧問
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教育訓練
| Inquiry | Description | Model | Repair Item |
| EPD210S | Controller | ||
| TYB111-A MAIO board | PCB | ||
| Side Fan (FW-10S0A-DC) | Fan | ||
| Wafer Counter Sensor(right) | Sensor | ||
| Wafer Counter Sensor(left) | Sensor | ||
| M3100 Power Supply EPD-54 | POWER SUPPLY | ||
| PCB,I/L board / VLV-INTERLOCK R1 | SG-12700 | PCB | |
| Fan ASSY | TP120SW | Fan | |
| REX CONTROLLER | REX-B871 NN-CS1B | Controller | |
| SG-2700B board | SG-2700B | PCB |
