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De-Installation
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Installation
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onsite maintenance
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PM Service
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on-call Service
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Warranty Service
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Technical Consultant
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Training
Products Series
Semiconductor Spare Parts
| Inquiry | Description | Model | GT Model | GT P/N |
| GT REVERSE ARM MOTOR | TEL P/N:1386-445909-11 <REVERSE ARM MOTOR> | RVS.T.C.M | BB02-0441-0001-20 | |
| GT STEP5 MOTOR DRIVE BOARD | TEL P/N:1981-607041-11 <STEP5 MOTOR DRIVE BOARD> | RVS.T.C.D | BB02-0441-0004-20 | |
| GT SMIF INDEXER MOTOR ASSY | TEL P/N:1380-101804-11 <SMIF INDEXER MOTOR ASSY> | S.I.M | BB02-0101-0009-20 | |
| GT SMIF INDEXER MOTOR DRIVER | TEL P/N:040-000908-1 <CSD5814N-P> | S.I.D | BB02-0101-0010-20 | |
| GT C/S ARM X MOTOR ASSY | TEL P/N:1380-101264-11 <C/S X MOTOR ASSY> | C.A.X.M | BB99-0102-0009-20 | |
| GT C/S ARM X MOTOR DRIVER | TEL P/N:1380-100625-11 <PMM-BD-5702-4> | C.A.X.D | BB99-0102-0010-20 | |
| GT C/S ARM Y MOTOR ASSY | TEL P/N:1380-001257-11 <MSM5AZA7E> | C.A.Y.M | BB99-0102-0011-20 | |
| GT C/S ARM Y MOTOR DRIVER | TEL P/N:1380-101452-12 <MSD5A1A1XX> | C.A.Y.D | BB99-0102-0012-20 | |
| GT C/S ARM Z MOTOR ASSY | TEL P/N:1380-001258-11 <MSM5AZA6F> | C.A.Z.M | BB99-0102-0013-20 | |
| GT C/S ARM Z MOTOR DRIVER | TEL P/N:1380-101451-12 <MSD5A1XX> | C.A.Z.D | BB99-0102-0014-20 |
