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De-Installation
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Installation
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onsite maintenance
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PM Service
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on-call Service
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Warranty Service
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Technical Consultant
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Training
Products Series
Semiconductor Spare Parts
| Inquiry | Description | Model | GT Model | GT P/N |
| GT MAIN ARM THETA MOTOR ASSY | TEL P/N:1386-456663-12 <103H7522-80E3> | M.A.T.M | BB99-0202-0001-20 | |
| GT MAIN ARM THETA MOTOR DRIVER | TEL P/N:040-570216-1 <PMM-BD-5702-4> | M.A.T.D | BB99-0221-0003-20 | |
| GT MAIN ARM Y MOTOR ASSY | TEL P/N:1386-448421-11 <MSM011ABE> | M.A.Y.M | BB99-0102-0005-20 (同SMIF Y) | |
| GT MAIN ARM Y MOTOR DRIVER | TEL P/N:1380-002055-11 <MSD021A1XX10> | M.A.Y.D | BB99-0221-0007-20 | |
| GT MAIN ARM Z MOTOR ASSY | TEL P/N:1386-453040-11 <MSM021ABF> | M.A.Z.M | BB99-0221-0004-20 | |
| GT MAIN ARM Z MOTOR DRIVER | TEL P/N:1380-002055-11 <MSD021A1XX10> | M.A.Z.D | BB99-0221-0005-20 | |
| GT SCR L-ARM MOTOR ASSY | TEL P/N:1386-447877-11 <SCR L-ARM MOTOR ASSY> | LP.A.S.M | BB02-0331-0087-20 | |
| GT SCR R-ARM MOTOR ASSY | TEL P/N:1386-450104-11 <SCR R-ARM MOTOR ASSY> | RP.A.S.M | BB02-0331-0088-20 | |
| GT SCR BRUSH MOTOR ASSY | TEL P/N:1386-447256-11 <SCR BRUSH MOTOR ASSY> | B.A.M | BB02-0331-0085-20 | |
| GT STEP5 MOTOR DRIVE BOARD | TEL P/N:1981-607041-11 <STEP5 MOTOR DRIVE BOARD> | S.5.D | BB02-0331-0086-20 |
