Semiconductor Used Equipment
Installation/ Relocation
TEL Wafer Scrubber SS-4
No.：SS-4
․Location Inspection
․Route Inspection
․Tool Inspection
․Tool Recover
․Install to Tier 1 release process
․Route Inspection
․Tool Inspection
․Tool Recover
․Install to Tier 1 release process
․Location Inspection
․Route Inspection
․Tool Inspection
․Tool Recover
․Install to Tier 1 release process
․Route Inspection
․Tool Inspection
․Tool Recover
․Install to Tier 1 release process
| Description | TEL Wafer Scrubber SS-4 | |
|---|---|---|
| Manufacturer | Tokyo Electron Limited | |
| Module | TF/Wet | |
| Wafer Size | 200mm | |
| Sales Record | - | |
-
De-Installation
-
Installation
-
onsite maintenance
-
PM Service
-
on-call Service
-
Warranty Service
-
Technical Consultant
-
Training
