Semiconductor Used Equipment
EQ Utilization Upgrade
TEL Furnace Alpha-8S/SE Turnkey
No.：Alpha-8S/ 8SE
․Process Convert
․Heater Modification
․Open Cassette convert to SMIF Indexer
․Exhaust Piping Modification
․Pumping Line Modification
․Phase Out Parts Convert
․Heater Modification
․Open Cassette convert to SMIF Indexer
․Exhaust Piping Modification
․Pumping Line Modification
․Phase Out Parts Convert
․Process Convert
․Heater Modification
․Open Cassette convert to SMIF Indexer
․Exhaust Piping Modification
․Pumping Line Modification
․Phase Out Parts Convert
․Heater Modification
․Open Cassette convert to SMIF Indexer
․Exhaust Piping Modification
․Pumping Line Modification
․Phase Out Parts Convert
| Description | TEL Furnace Alpha-8S/SE Turnkey | |
|---|---|---|
| Manufacturer | Tokyo Electron Limited | |
| Module | Diffusion | |
| Wafer Size | 150mm/200mm | |
| Sales Record | 350 Set Above | |
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De-Installation
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Installation
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onsite maintenance
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PM Service
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on-call Service
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Warranty Service
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Technical Consultant
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Training
