Semiconductor Spare Parts
GTPC M
Negative Pressure Leak Prevention and Detection System for Photoresist Piping
No.：TEL ACT8 / TEL ACT12 / TEL MARK8
This system is designed to be externally connected to equipment such as TEL ACT8, TEL ACT12, and TEL MARK8, and is used for the external water line management of temperature-controlled double-layer photoresist tubing.
The system features include:
✽ Maintaining negative pressure within the tubing to prevent water leakage and water ingress into the photoresist tubing.
✽ Real-time monitoring of internal water line pressure, with alarm alerts triggered upon detection of abnormal pressure conditions.
The system features include:
✽ Maintaining negative pressure within the tubing to prevent water leakage and water ingress into the photoresist tubing.
✽ Real-time monitoring of internal water line pressure, with alarm alerts triggered upon detection of abnormal pressure conditions.
This system is designed to be externally connected to equipment such as TEL ACT8, TEL ACT12, and TEL MARK8, and is used for the external water line management of temperature-controlled double-layer photoresist tubing.
The system features include:
✽ Maintaining negative pressure within the tubing to prevent water leakage and water ingress into the photoresist tubing.
✽ Real-time monitoring of internal water line pressure, with alarm alerts triggered upon detection of abnormal pressure conditions.
The system features include:
✽ Maintaining negative pressure within the tubing to prevent water leakage and water ingress into the photoresist tubing.
✽ Real-time monitoring of internal water line pressure, with alarm alerts triggered upon detection of abnormal pressure conditions.
System Specifications
Control Box (GTPC M):
Dimensions: 350 × 100 × 210 mm
Power Requirements: AC 85–240V
Pump Box (GTPC P):
Dimensions: 250 × 110 × 210 mm
External Tubing Specification: OD 1/2 inch quick-connect fitting
Control Box (GTPC M):
Dimensions: 350 × 100 × 210 mm
Power Requirements: AC 85–240V
Pump Box (GTPC P):
Dimensions: 250 × 110 × 210 mm
External Tubing Specification: OD 1/2 inch quick-connect fitting
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De-Installation
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Installation
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onsite maintenance
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PM Service
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on-call Service
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Warranty Service
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Technical Consultant
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Training
